ISO 7 (Class 10,000) Cleanroom Configuration
Designed based on ISO 14644-1 Standards & Core Purification Principles
Core Standards & Definitions
- ISO 14644-1: 0.5μm particles ≤ 352,000/m³
- 5μm particles: ≤ 2,930/m³
- Equivalent Standard: "Class 10,000" in GB50073-2013
- Core Principle: Dilution & Displacement (Diluting particles via HEPA filtration)
Key Environmental Parameters
- Air Change Rate: 30-60 times/hour (Depends on heat load/process)
- Pressure Control: +10Pa to +15Pa relative to lower-class areas
- Temp/Humidity: 20-24°C (±2°C), 45%-55% (±5%)
- Illumination: Typically 300 Lux
Implementation: FFU Coverage
- Solution: FFU (Fan Filter Unit) array forms a "ceiling filtration layer"
- Advantages: Uniform airflow, flexible installation, high energy efficiency
- Status: Mainstream method for ISO 7 cleanrooms
1. Air Purification & HVAC System
*Quantities estimated based on a 100㎡ cleanroom example
| Device Name | Specifications & Requirements | Est. Qty | Function & Remarks |
|---|---|---|---|
| FFU (Fan Filter Unit) |
Core Device Size: 1175x1175mm (Standard Module) Efficiency: H14 (≥99.995% @0.3μm) Motor: EC Brushless DC (Energy-saving) Noise: ≤52 dB(A) |
Coverage >80% | Provides uniform top-down airflow; critical for ensuring sufficient air change rates. |
| Modular AHU (Air Handling Unit) |
Airflow: Based on ACR (e.g., 12,600 m³/h) Sections: G4 Pre-filter + Cooling/Heating + Humidification + F8/F9 Mid-filter Control: VFD (Variable Frequency Drive) |
1 Unit | The "Processor" of air. Handles fresh air pre-treatment, temperature, and humidity control before supplying to FFUs. |
| Air Shower |
Double/Triple-blower, Stainless Steel Air Velocity: ≥25 m/s Features: Interlocking doors, Auto-induction |
1 Set | Personnel purification channel to remove surface dust before entering the cleanroom. |
| Pass Box | Stainless steel, UV Sterilization Lamp Mechanical or Electronic Interlock |
Min 2 Units | Material transfer channel; prevents direct airflow and cross-contamination during transfer. |
| Return Air System | Single/Double-layer grilles with primary filter | Evenly Distributed | Located at the bottom of walls to ensure smooth airflow and circulation. |
2. Enclosure & Finishing System
| Item | Materials & Requirements | Function & Remarks |
|---|---|---|
| Walls & Ceiling | Color-coated steel panels (Rock wool/Mg-O core), ≥50mm thick Smooth, corrosion-resistant, easy to clean |
Forms a sealed space. Ceiling must support FFU weight and remain airtight. |
| Flooring | PVC homogeneous sheet or Epoxy self-leveling Anti-static, wear-resistant, seamless |
Dust-free and anti-slip. Anti-static properties are crucial for electronics manufacturing. |
| Doors & Windows | Airtight purification doors/windows, double glazing | Reduces air leakage to maintain positive pressure. |
| Coving (Corners) | Aluminum R-corners (Wall-to-Floor, Wall-to-Wall) | Eliminates dead corners for easier cleaning and maintenance. |
3. Monitoring & Control System
| Device Name | Functional Requirements |
|---|---|
| Temp & Humidity Sensors | Real-time monitoring with feedback to AHU for automatic adjustment. |
| Differential Pressure Gauge | Digitally displays pressure difference between cleanroom, outside, and adjacent areas. |
| Particle Counter | Portable or Online type for regular verification of cleanliness levels. |