Standard Cleanroom SolutionsIOS6

Key knowledge points for ISO 6 cleanrooms

  • Cleanliness Level ISO 6 requires that the number of suspended particles of 0.5 μm in size does not exceed 35,200 per cubic meter of air. This is 10 times stricter than ISO 7. Core Implementation Method: (Quasi) Unidirectional Flow. The airflow moves parallel in a single direction at a uniform cross-sectional velocity (typically 0.35-0.45 m/s), acting like an "air piston" to instantly expel pollutants from the working area, rather than merely diluting them.
  • Key Design Parameters: Air Change Rate: Extremely high, typically 70-160 air changes per hour or more, depending on the room layout and equipment heat load. Flow Velocity: The average wind speed across the working area cross-section must be maintained at 0.35-0.45 m/s and remain uniform and stable. Pressure Difference Control: A positive pressure of +15 Pa to +25 Pa is maintained relative to adjacent lower-level areas (such as ISO 7 corridors), with higher control accuracy required. Temperature and Humidity Control: Higher accuracy is required, typically ±1°C for temperature and ±5% for humidity.
  • Core Design Concept: "Control and Containment" • The goal is to create an invisible, parallel barrier of clean air in critical process areas. • All design elements (supply air, return air, layout, structure) must serve to maintain the unidirectional and uniform flow of air.
  • 2 mainstream implementation schemes: FFU full coverage + raised floor return (vertical unidirectional flow): The most classic and reliable method. FFUs cover the entire ceiling (>80% coverage rate), and clean air flows vertically downwards, entering the return air plenum through the raised floor, forming a perfect vertical piston flow. This configuration will be the preferred option in this document. • FFU full coverage + side wall return (quasi-vertical unidirectional flow): Used when a raised floor is not feasible. The arrangement of the return air wall needs to be carefully designed to ensure that the airflow pattern is basically vertically downwards.
  • The fundamental difference from ISO 7: It has been upgraded from a "device" to a "system integration masterpiece." The success of ISO 6 relies heavily on the perfect matching of various subsystems (structure, air conditioning, control) and extremely high construction craftsmanship.

Commercial Cleanroom ISO Class 6 Standard Configuration List

Based on a 100m² Area • Upgrades for Unidirectional Flow

A. Air Purification & HVAC System (Core Upgrade Area)

No. Subsystem/Device Specifications & Technical Requirements (ISO 6) Quantity (100m²) & Explanation
1 Fan Filter Unit (FFU)
  • Efficiency: H14 Level (Mandatory)
  • Motor: EC brushless DC motor with group control
  • Velocity Uniformity: Difference < 0.1 m/s within same area
  • Coverage: ≥ 80% of usable ceiling area
 Quantity calculated based on coverage rate and wind speed. FFUs must almost completely cover the ceiling to ensure unidirectional airflow.
2 Modular Air Handling Unit
  • High Airflow: Based on 100 air changes/hour (> 28,000 m³/h for 100m²)
  • Sections: Pre-filter (G4) + Medium (F8) + Cooling/Heating Coils + Humidifier + Fan + Chemical (optional) + High-efficiency (F9/H10)
  • Fan: Variable frequency (VFD) required
  • Alt Scheme: MAU (Fresh Air) + RCU (Recirculation)
 One set.
Handles fresh air processing and deep dehumidification (MAU) while RCU handles sensible heat.
3 Raised Floor System
  • Material: High-strength Al-alloy or Steel perforated panels
  • Coverage: ≥ 50%
  • Support: Adjustable brackets (flatness ±2mm)
  • Plenum Height: 300-600mm
 Characteristic configuration for ISO 6 vertical unidirectional flow. Ensures uniform return airflow path.
4 Air Shower Room
  • Type: Double/Multi-person, Wind speed ≥ 25m/s
  • Features: Adjustable time, 304 Stainless Steel, Touchscreen/Auto-sensor
 1-2 sets.
Mandatory decontamination step for personnel entering high-level areas.
5 Item Transfer System
  • Transfer windows with self-cleaning function (fan + HEPA)
  • Or floor-standing air showers for carts
 At least one air shower or large pass-through window required. Material purification standards are strictly enforced.

B. Building Envelope & Interior Finishing (Technology Upgrade Area)

No. Project Name Materials & Requirements (ISO 6)
1 Walls & Ceilings
  • Panels: Thickened color-coated steel (e.g., 75mm+ rock wool) for high strength
  • Ceiling: Must withstand load of full FFU installation and ensure absolute airtightness
  • Sealing: All joints treated with special sealant
2 Ground The Raised Floor System (see above) is the core component. The sub-floor area must be treated to prevent dust generation/accumulation.
3 Doors & Windows
  • Cleanroom doors/windows with highest airtightness rating
  • Observation windows use double-layered glass; all gaps sealed
4 Process Requirements
  • Coving: Large radii (R ≥ 50mm) for all corners
  • Integration: Lights, sprinklers, detectors must be embedded/flush with ceiling to avoid airflow disruption

C. Monitoring & Control Systems (Precision Upgrade Area)

No. Device Name Functional Requirements
1 Wind Speed Monitoring Multiple sensors placed in critical work areas to monitor average speed and uniformity, controlling FFU group speed accordingly.
2 Differential Pressure Control Multi-point sensing. Precisely controls supply/return airflow via electric dampers to maintain strict pressure gradients between rooms.
3 Continuous Monitoring Online particle counters strongly recommended to monitor 0.5μm and 5.0μm particles in real-time with alarm thresholds.
4 Central Management (BMS) Mandatory configuration. Integrates all parameters (Temp, Humidity, Pressure, Airflow, Particles), logging, alarms, and remote access.
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